Description

ULVAC PMB-006CS Mechanical Booster Pump Simple Type: Pump By using them together with dry pumps, oil rotary vacuum pumps or water-sealed pumps, mechanical booster pumps can increase the evacuation speed in the 1 kPa to 0.1 Pa range, where rough pump evacuation speed drops. The models in the PRC-A Series are the successors to ULVAC's PMB-006C(M), and PMB-012C(M) models. Like the PMB-C(M) Series, they are Roots pumps designed for general-purpose applications, as well as semiconductor and LC manufacturing processes that require a highly clean atmosphere inside and outside the pump. The PMB-B Series is ideal for large-capacity evacuation, such as for heat treatment furnaces and melting furnaces. In addition to general use, these pumps are well-suited to semiconductor manufacturing processes, CO2 laser processes, and other processes. Download the datasheet (PDF)