ENTEGRIS » Chambergard
Details
| Part Number | Chambergard |
|---|---|
| Manufacturer | ENTEGRIS |
| Category | PRODUCTS-C |
| Price | Request Quote |
| Lead Time | Request Quote |
Description
Entegris Chambergard Series Fast Vent Diffusers Simple Type: Vent Diffuser ChamberGardM fast vent diffusers are the choice to reliably increase system throughput by minimizing load lock vent cycle time. These diffusers provide rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber. They combine the flow characteristics of a diffuser with a high efficiency filter to increase efficiency and throughput. Download the datasheet (PDF)
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Specifications
Not available
Datasheet
Not available
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